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In the work, we study the mechanisms of structural phase state formation in NiTi surface layers after low-energy pulsed electron beam irradiation depending on the electron beam energy density. It is revealed that after electron beam treatment of the NiTi specimens at energy densities E[1]=15 J/cm{2}, E[2]=20 J/cm{2}, and E[3]=30 J/cm{2}, a series of effects is observed: the absence of the Ti[2]Ni phase and the presence of new peaks correspond to the B19 martensite phase with monoclinic structure. Estimation of the relative volume content of the B2 and B19 phases from the total intensity of their peaks shows that the percentage of the martensite phase increases from ~5 vol.% in the NiTi specimen irradiated at E[1]=15 J/cm{2} to ~80 vol.% in the NiTi specimen irradiated at E[3]=30 J/cm{2}. It is found that in the NiTi specimens irradiated at E<=20 J/cm{2}, the layer that contains a martensite phase resides not on the surface but at some depth from it

Phase composition in NiTi near-surface layers after electron beam treatment and its variation depending on beam energy density