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For multilayered materials, reflectivity depends on the complex dielectricfunction of all the constituent layers, and a detailed analysis is required toseparate them. Furthermore, for some cases, new quantum states can occur at theinterface which may change the optical properties of the material. In thispaper, we discuss various aspects of such analysis, and present aself-consistent iteration procedure, a versatile method to extract and separatethe complex dielectric function of each individual layer of a multilayeredsystem. As a case study, we apply this method to LaAlO$_{3}$/SrTiO$_{3}$heterostructure in which we are able to separate the effects of the interfacefrom the LaAlO$_{3}$ film and the SrTiO$_{3}$ substrate. Our method can beapplied to other complex multilayered systems with various numbers of layers.

Self-consistent iteration procedure in analyzing reflectivity and spectroscopic ellipsometry data of multilayered materials and their interfaces