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This paper reports result of calculation and experimental realization of anelectromechanical system that consists of a high-Q mechanical oscillatorparametrically coupled in the manner of a capacitive transducer with a RFcircuit, which is in turn inductively coupled with another RF circuit. Thesystem operates in the resolved sideband regime when the mechanicaloscillator's frequency is larger than the electrical circuits' bandwidths.Using two coupled RF circuits allowed one to enhance the interaction betweenthem and the mechanical oscillator which is one of flexural vibrational modesof a free-edge circular silicon wafer. Such a coupled electromechanical systemcan be used as a high-sensitive capacitive vibration sensor.

Enhanced interaction between a mechanical oscillator and two coupled resonant electrical circuits