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We demonstrate the operation of coupled-cavity terahertz frequency quantum-cascade lasers composed of two sub-cavities separated by an air gap realized by optical lithography and dry etching. This geometry allows stable, single mode operation with typical side mode suppression ratios in the 30–40 dB range. We employ a transfer matrix method to model the mode selection mechanism. The obtained results are in good agreement with the measurements and allow prediction of the operating frequency.

Coupled-cavity terahertz quantum cascade lasers for single mode operation