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We present nanoscale NMR measurements performed with nitrogen-vacancy (NV)centers located down to about 2 nm from the diamond surface. NV centers werecreated by shallow ion implantation followed by a slow, nanometer-by-nanometerremoval of diamond material using oxidative etching in air. The close proximityof NV centers to the surface yielded large 1H NMR signals of up to 3.4 uT-rms,corresponding to ~330 statistically polarized or ~10 fully polarized protonspins in a ~(1.8 nm)^3 detection volume.

Nanoscale nuclear magnetic resonance with a 1.9-nm-deep nitrogen-vacancy sensor