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We present the design and implementation of a scanning probe microscope,which combines electrically detected magnetic resonance (EDMR) and(photo-)conductive atomic force microscopy ((p)cAFM). The integration of a3-loop 2-gap X-band microwave resonator into an AFM allows the use ofconductive AFM tips as a movable contact for EDMR experiments. The opticalreadout of the AFM cantilever is based on an infrared laser to avoiddisturbances of current measurements by absorption of straylight of thedetection laser. Using amorphous silicon thin film samples with varying defectdensities, the capability to detect a spatial EDMR contrast is demonstrated.Resonant current changes as low as 20 fA can be detected, allowing the methodto realize a spin sensitivity of 8*10^6 spins/Hz^0.5 at room temperature.

The EDMR Microscope - Combining Conductive Atomic Force Microscopy with Electrically Detected Magnetic Resonance