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During the solid phase reaction of a Ni(Pd) alloy with Si(100), phase separation of binary Ni- and Pd-silicides occurs. The PdSi monosilicide nucleates at temperatures significantly below the widely accepted nucleation temperature of the binary system. The decrease in nucleation temperature originates from the presence of the isomorphous NiSi, lowering the interface energy for PdSi nucleation. Despite the mutual solubility of NiSi and PdSi, the two binaries coexist in a temperature window of 100 °C. Only above 700 °C a Ni1–xPdxSi solid solution is formed, which in turn postpones the NiSi2 formation to a higher temperature due to entropy of mixing. Our findings highlight the overall importance of the interface energy for nucleation in ternary systems.

On the nucleation of PdSi and NiSi2 during the ternary Ni(Pd)/Si(100) reaction