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We investigate the effect of electron beam irradiation on the dielectricproperties of As2S3 Chalcogenide glass. By means of low-loss Electron EnergyLoss Spectroscopy, we derive the permittivity function, its dispersiverelation, and calculate the refractive index and absorption coefficients underthe constant permeability approximation. The measured and calculated resultsshow, to the best of our knowledge, a heretofore unseen phenomenon: thereduction in the permittivity of <40%, and consequently a modification of therefractive index follows, reducing it by 20%, hence suggesting a significantchange on the optical properties of the material. The plausible physicalphenomena leading to these observations are discussed in terms of the homopolarand heteropolar bond dynamics under high energy absorption.

Electron irradiation induced reduction of the permittivity in chalcogenide glass (As2S3) thin film