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We present a combined scanning force and tunneling microscope working in adilution refrigerator that is optimized for the study of individual electronicnano-devices. This apparatus is equipped with commercial piezo-electricpositioners enabling the displacement of a sample below the probe over severalhundred microns at very low temperature, without excessive heating. Atomicforce microscopy based on a tuning fork resonator probe is used for cryogenicprecise alignment of the tip with an individual device. We demonstrate thelocal tunneling spectroscopy of a hybrid Josephson junction as a function ofits current bias.

A subKelvin scanning probe microscope for the electronic spectroscopy of an individual nano-device