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A single phase InN epitaxial film is grown on a bulk In2O3(111) wafer by plasma-assisted molecular beam epitaxy. The InN/In2O3 orientation relationship is found to be (0001) ‖ (111) and [11¯00] ‖ [112¯]. High quality of the layer is confirmed by the small widths of the x-ray rocking curves, the sharp interfaces revealed by transmission electron microscopy, the narrow spectral width of the Raman E2h vibrational mode, and the position of the photoluminescence band close to the fundamental band gap of InN.

Growth of wurtzite InN on bulk In2O3(111) wafers