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This Letter introduces a Semiconductor-Under-Insulator (SUI) technology inInP for designing strip waveguides that interface InP photonic crystal membranestructures. Strip waveguides in InP-SUI are supported under an atomic layerdeposited insulator layer in contrast to strip waveguides in silicon supportedon insulator. We show a substantial improvement in optical transmission whenusing InP-SUI strip waveguides interfaced with localized photonic crystalmembrane structures when compared with extended photonic crystal waveguidemembranes. Furthermore, SUI makes available various fiber-coupling techniquesused in SOI, such as sub-micron coupling, for planar membrane III-V systems.

A Semiconductor Under Insulator Technology in Indium Phosphide