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Recently-reported data suggest that bubble nucleation on surfaces withnano-sized features (cavities and posts) may occur close to the thermodynamicsaturation temperature. However, according to the traditional theory ofheterogeneous bubble nucleation, such low nucleation temperatures are possibleonly for surfaces with micro-scale cavities. Motivated by this apparentcontradiction, we have used infrared thermometry to measure the nucleationtemperature of water on custom-fabricated nano- to micro-scale cavities (from90 nm to 4.5 um in diameter) and posts (from 60 nm to 5 um in diameter),machined on ultra-smooth and clean silicon wafers using electron beamlithography. Our cavity data are in agreement with the predictions of theYoung-Laplace equation, thus re-affirming the correctness of the classic viewof heterogeneous bubble nucleation, at least for the water-silicon systeminvestigated here. The data also suggest that individual posts of any size havean insignificant effect on bubble nucleation, as expected from theory.  Keywords: Bubble nucleation, superheat, artificial cavities and posts,nanosize, Young-Laplace

Bubble Nucleation on Nano- to Micro-size Cavities and Posts: An Experimental Validation of Classical Theory