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We report on the fabrication of two-dimensional periodic photonicnanostructures by nanoimprint lithography and dry etching, and theirintegration into a 1-{\mu}m-thin mono-crystalline silicon solar cell. Thanks tothe periodic nanopatterning, a better in-coupling and trapping of light isachieved, resulting in an absorption enhancement. The proposed light trappingmechanism can be explained as the superposition of a graded index effect and ofthe diffraction of light inside the photoactive layer. The absorptionenhancement is translated into a 23% increase in short-circuit current, ascompared to the benchmark cell, resulting in an increase in energy-conversionefficiency.

Photonic assisted light trapping integrated in ultrathin crystalline silicon solar cells by nanoimprint lithography