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We have studied magnetism in anatase Ti$_{1-x}$Co$_x$O$_{2-\delta}$ ({\it x}= 0.05) thin films with various electron carrier densities, by soft x-raymagnetic circular dichroism (XMCD) measurements at the Co $L_{2,3}$ absorptionedges. For electrically conducting samples, the magnetic moment estimated byXMCD was $<$ 0.3 $\mu_B$/Co using the surface-sensitive total electron yield(TEY) mode, while it was 0.3-2.4 $\mu_B$/Co using the bulk-sensitive totalfluorescence yield (TFY) mode. The latter value is in the same range as thesaturation magnetization 0.6-2.1 $\mu_B$/Co deduced by SQUID measurement. Themagnetization and the XMCD intensity increased with carrier density, consistentwith the carrier-induced origin of the ferromagnetism.

Ferromagnetism of cobalt-doped anatase TiO$_2$ studied by bulk- and surface-sensitive soft x-ray magnetic circular dichroism