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In this work we investigate the process of iron nitride (Fe-N) phaseformation using 2 at.% Al or 2 at.% Ti as additives. The samples were preparedwith a magnetron sputtering technique using different amount of nitrogen duringthe deposition process. The nitrogen partial pressure (\pn) was varied between0-50% (rest Argon) and the targets of pure Fe, [Fe+Ti] and [Fe+Al] weresputtered. The addition of small amount of Ti or Al results in improvedsoft-magnetic properties when sputtered using \pn $\leq$ 10\p. When \pn isincreased to 50\p non-magnetic Fe-N phases are formed. We found that ironmononitride (FeN) phases (N at% $\sim$50) are formed with Al or Ti addition at\pn =50% whereas in absence of such addition \eFeN phases (N\pat$\sim$30) areformed. It was found that the overall nitrogen content can be increasedsignificantly with Al or Ti additions. On the basis of obtained result wepropose a mechanism describing formation of Fe-N phases Al and Ti additives.

Formation of iron nitride thin films with Al and Ti additives