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Applications in quantum information processing and photon detectors arestimulating a race to produce the highest possible quality factor on-chipsuperconducting microwave resonators. We have tested the surface-dominated losshypothesis by systematically studying the role of geometrical parameters on theinternal quality factors of compact resonators patterned in Nb on sapphire.Their single-photon internal quality factors were found to increase with thedistance between capacitor fingers, the width of the capacitor fingers, and theimpedance of the resonator. Quality factors were improved from 210,000 to500,000 at T = 200 mK. All of these results are consistent with our startinghypothesis.

Improving the Quality Factor of Microwave Compact Resonators by Optimizing their Geometrical Parameters