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A suspended system for measuring the thermal properties of membranes ispresented. The sensitive thermal measurement is based on the 3$\omega$ dynamicmethod coupled to a V$\ddot{o}$lklein geometry. The device obtained usingmicro-machining processes allows the measurement of the in-plane thermalconductivity of a membrane with a sensitivity of less than 10nW/K(+/-$5x10^{-3}$Wm$^{-1}K^{-1}$ at room temperature) and a very high resolution($\Delta K/K =10^{-3}$). A transducer (heater/thermometer) centered on themembrane is used to create an oscillation of the heat flux and to measure thetemperature oscillation at the third harmonic using a Wheatstone bridge set-up.Power as low as 0.1nanoWatt has been measured at room temperature. The methodhas been applied to measure thermal properties of low stress silicon nitrideand polycrystalline diamond membranes with thickness ranging from 100 nm to 400nm. The thermal conductivity measured on the polycrystalline diamond membranesupport a significant grain size effect on the thermal transport.

Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3w-Volklein method