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A two-dimensional hybrid model for an electron cyclotron resonance (ECR) plasma reactor is improved by taking into account the microwave absorption. With this code, the velocity and angle distribution function of ions in the source and downstream areas, and the ion current density at the substrate surface in an extended ECR plasma reactor were investigated. The spatial profiles as well as the dependence of these distribution functions on pressure and microwave power were discussed. It is shown that the results are in good agreement with many experimental measurements.

Simulation of ion transport in an extended electron cyclotron resonance plasma