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In this paper, a four-point characterization method is developed forresistive samples connected to either resistive or capacitive contacts.Provided the circuit equivalent of the complete measurement system is knownincluding coaxial cable and connector capacitances as well as source output andamplifier input impedances, a frequency range and capacitive scaling factor canbe determined, whereby four-point characterization can be performed. Thetechnique is demonstrated with a discrete element test sample over a widefrequency range using lock-in measurement techniques from 1 Hz - 100 kHz. Thedata fit well with a circuit simulation of the entire measurement system. Ahigh impedance preamplifier input stage gives best results, since lock-in inputimpedances may differ from manufacturer specifications. The analysis presentedhere establishes the utility of capacitive contacts for four-pointcharacterizations at low frequency.

Generalized four-point characterization method for resistive and capacitive contacts