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Microcavity plasma arrays of inverse pyramidal cavities have been fabricatedin p-Si wafers. Each cavity acts as a microscopic dielectric barrier discharge.Operated at atmospheric pressure in argon and excited with high voltage atabout 10 kHz, each cavity develops a localized microplasma. Experiments haveshown a strong interaction of individual cavities, leading to the propagationof wave-like optical emission structures along the surface of the array. Thisphenomenon is numerically investigated using computer simulation. The observedionization wave propagates with a speed of about 5 km/s, which agrees well theexperimental findings. It is found that the wave propagation is due tosequential contributions of a drift of electrons followed by drift of ionsbetween cavities seeded by photoemission of electrons by the plasma in adjacentcavities.

Ionization wave propagation on a micro cavity plasma array