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We have prepared iron nitride thin films by reactive rf sputtering of an iron target in an argon‐nitrogen plasma. The films present a wide variety of structures and compositions: α expanded bcc iron, amorphous Fe1−x‐Nx, γ’‐Fe4N, e‐Fe2–3N, and ζ‐Fe2N. Evolutions of the crystallographic structures and of the magnetic properties of the obtained phases are discussed versus the nitrogen concentration in the gaseous flow and the substrate temperature during deposition.

Magnetic and structural properties of iron nitride thin films obtained by argon-nitrogen reactive radio-frequency sputtering