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We investigate atomic force microscope nanolithography of single and bilayergraphene. In situ tip current measurements show that cutting of graphene is notcurrent driven. Using a combination of transport measurements and scanningelectron microscopy we show that, while indentations accompanied by tip currentappear in the graphene lattice for a range of tip voltages, real cuts arecharacterized by a strong reduction of the tip current above a thresholdvoltage. The reliability and flexibility of the technique is demonstrated bythe fabrication, measurement, modification and re-measurement of graphenenanodevices with resolution down to 15 nm.

Atomic force microscope nanolithography of graphene: cuts, pseudo-cuts and tip current measurements