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We present the integrated chip-scale tuning of multiple photonic crystalcavities. The optimized implementation allows effective and precise tuning ofmultiple cavity resonances (up to ~1.60 nm/mW) and inter-cavity phase (~ 0.038pi/mW) by direct local temperature tuning on silicon nanomembranes. Throughdesigning the serpentine metal electrodes and careful electron-beam alignmentto avoid cavity mode overlap, the coupled photonic crystal L3 cavities preservetheir high quality factors. The deterministic resonance and phase controlenables switching between the all-optical analogue ofelectromagnetically-induced-transparency (EIT) to flat-top filter lineshapes,with future applications of trapping photons/photonic transistors andoptoelectronic modulators.

Deterministic integrated tuning of multi-cavity resonances and phase for slow-light in coupled photonic crystal cavities