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Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors havepotential to be implemented as intrinsic phase qubits working at relativelyhigh temperatures. We report success in fabricating submicronLa$_{2-x}$Sr$_{x}$CuO$_{4}$ (LSCO) IJJ stacks carved out of single crystals. Wealso show a new fabrication method in which argon ion etching is performedafter focused ion beam etching. As a result, we obtained an LSCO IJJ stack inwhich resistive multi-branches appeared. It may be possible to control thenumber of stacked IJJs with an accuracy of a single IJJ by developing thismethod.

Fabrication of submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ intrinsic Josephson junction stacks