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Unlike c-plane nitrides, ``non-polar" nitrides grown in e.g. the a-plane orm-plane orientation encounter anisotropic in-plane strain due to the anisotropyin the lattice and thermal mismatch with the substrate or buffer layer. Suchanisotropic strain results in a distortion of the wurtzite unit cell andcreates difficulty in accurate determination of lattice parameters and solidphase group-III content (x_solid) in ternary alloys. In this paper we show thatthe lattice distortion is orthorhombic, and outline a relatively simpleprocedure for measurement of lattice parameters of non-polar group III-nitridesepilayers from high resolution x-ray diffraction measurements. We derive anapproximate expression for x_solid taking into account the anisotropic strain.We illustrate this using data for a-plane AlGaN, where we measure the latticeparameters and estimate the solid phase Al content, and also show that thismethod is applicable for m-plane structures as well.

Distorted wurtzite unit cells: Determination of lattice parameters of non-polar a-plane AlGaN and estimation of solid phase Al content