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Surface oxidation of the bottom ferromagnetic (FM) electrode, one of themajor detrimental factors to the performance of a Magnetic Tunnel Junction(MTJ), is difficult to avoid during the fabrication process of the MTJ's tunnelbarrier. Since Co rich alloys are commonly used for the FM electrodes in MTJs,over-oxidation of the tunnel barrier results in the formation of a CoOantiferromagnetic (AF) interface layer which couples with the bottom FMelectrode to form a typical AF/FM exchange bias (EB) system. In this work,surface oxidation of the CoFe and CoFeB bottom electrodes was detected viamagnetometry measurements of exchange-bias characterizations including the EBfield, training effect, uncompensated spin density, and coercivity. Variationsof these parameters were found to be related to the surface oxidation of thebottom electrode, among them the change of coercivity is most sensitive.Annealed samples show evidence for an oxygen migration back to the MgO tunnelbarrier by annealing.

Detection of bottom ferromagnetic electrode oxidation in magnetic tunnel junctions by magnetometry measurements