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We demonstrate low loss ridge waveguides and the first ring resonators forthe mid-infrared, for wavelengths ranging from 5.4 to 5.6 {\mu}m. Structureswere fabricated using electron-beam lithography on the silicon-on-sapphirematerial system. Waveguide losses of 4.0 +/- 0.7 dB/cm are achieved, as well asQ-values of 3.0 k.

Silicon Waveguides and Ring Resonators at 5.5 {\mu}m