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We have investigated the properties of Zn diffusion in the In0.53Ga0.47As/In0.52Al0.48As superlattice and have made optical guides delineated by Zn‐induced layer disordering in the multilayers. Measurements on the single‐mode waveguides show loses as low as 2.3 dB/cm including coupling loss

Low-loss, single-mode In0.53Ga0.47As/In0.52Al0.48As/InP optical waveguides fabricated by Zn-induced impurity-induced layer disordering