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We have carried out an experimental investigation of the charge state distribution of ions produced in the vacuum arc plasma for the case when the cathode is a compound or alloy. The plasma was generated in a metal vapor vacuum arc ion source, and the charge state spectra were measured using a time‐of‐flight method. We have compared these spectra to the spectra obtained from cathodes of the constituent elements. The cathode materials used and reported on here were the following groups: SiC/Si/C [i.e., we have compared the spectra obtained using a cathode of silicon carbide with the spectra obtained using (a) a silicon cathode and (b) a carbon cathode], TiC/TiN/TiO2/Ti/C, WC/W/C, (UC‐ZrC)/UN/U/Zr/C, brass/Cu/Zn, and stainless steel/Fe/Cr/Ni. The arc current employed throughout was approximately 100 A. We find that the charge state distributions change depending on the elemental composition of the alloy or compound of which the cathode is fabricated.

Ion spectra of vacuum arc plasma with compound and alloy cathodes