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A deterministic design of an ultrahigh Q, wavelength scale mode volumephotonic crystal nanobeam cavity is proposed and experimentally demonstrated.Using this approach, cavities with Q>10^6 and on-resonance transmission T>90%are designed. The devices fabricated in Si and capped with low-index polymer,have Q=80,000 and T=73%. This is, to the best of our knowledge, the highesttransmission measured in deterministically designed, wavelength scale high Qcavities.

Photonic Crystal Nanobeam Cavity Strongly Coupled to the Feeding Waveguide