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A model is described for predicting equilibrium ion charge state distributions and soft x‐ray emissions for highly charged ion plasmas confined in magnetic mirrors. Such a plasma would be generated and sustained with electron cyclotron resonance (ECR) heating. The model is then used to analyze a typical laboratory‐sized ECR mirror plasma such as MIMI [Phys. Fluids 28, 3116 (1985)]. Computations suggest that an experiment of this size should readily achieve a highly charged ion operating regime of relevance to studies of ECR highly charged ion plasma. In particular, these devices may be promising candidates as steady‐state soft x‐ray sources for x‐ray lithography

Modeling of an electron cyclotron resonance heated mirror plasma for highly charged ion and soft x-ray sources