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A new isotope‐specific and quantitative technique based on self‐detection in a position‐sensitive detector has been developed for the imaging of radio‐carbon clusters in high‐purity Ge. Using a novel position‐sensitive detector concept, a one‐dimensional spatial resolution of ∼200 μm FWHM and a sensitivity of ∼6×107 14C atoms per cluster has been obtained. This technique can be applied to other semiconductors which can be used to fabricate self‐counting position‐sensitive nuclear radiation detectors.

Imaging of radio-carbon clusters in high-purity germanium using a self-detection scheme