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A strain sensor using a stress-magnetoresistance effect of a Ni–Fe/Mn–Ir exchange-coupled magnetic film was fabricated and evaluated. The stress magnetoresistance is used in the inverse magnetostrictive effect and the magnetoresistance effect in the magnetic film since an external stress is changed into an electric resistance in it. A compressive stress was measured by the strain sensor with a Mn–Ir (10 nm)/Ni–Fe (50 nm)/Ru (1 nm) exchange-coupled film. The change in resistivity Δρ/ρ is proportional to the applied compressive stress σ for σ≦50 MPa in the strain sensor. When increasing Ni–Fe layer thickness in the strain sensor, a gauge factor increased.

Strain sensor using stress-magnetoresistance effect of Ni–Fe/Mn–Ir exchange-coupled magnetic film