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The authors developed a new analysis technique for atomic disorder structuresin full-Heusler alloys using x-ray diffraction (XRD) with Co-Ka and Cu-Kasources. The developed technique can quantitatively evaluate all the atomicdisorders for the exchanges between X, Y, and Z atoms in full-Heusler X2YZalloys. In particular, the technique can treat the DO3 disorder that cannot beanalyzed by ordinary Cu-Ka XRD. By applying this technique to full-HeuslerCo2FeSi alloy thin films formed by rapid thermal annealing (RTA),RTA-temperature (TA) dependence of the atomic disorders was revealed. The siteoccupancies of Co, Fe, and Si atoms on their original sites were 98 %, 90 %,and 93 %, respectively, for the film formed at TA = 800 degree C, indicatingthat the RTA-formed Co2FeSi film had the L21 structure with the extremely highdegree of ordering.

Quantitative analysis of atomic disorders in full-Heusler Co2FeSi alloy thin films using x-ray diffraction with Co-Ka and Cu-Ka sources