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Optical properties of planar thin film metamaterials were measured at roomand liquid nitrogen temperatures using terahertz time-domain spectroscopy. Theoperation of metamaterials at cryogenic temperatures is anticipated to be apromising path towards low-loss metamaterials since nonradiative losses arestrongly suppressed due to higher charge mobility. A 14% increase in thequality factor of the resonances was experimentally observed. It was limited bythe high electron scattering rate due to defects in thin films. Supplementarysimulations assuming metamaterials made of thick films reveal a temperaturecontrolled behaviour and a 40% increase of the Q-factor at 10 K.

Cryogenic temperatures as a path towards high-Q terahertz metamaterials