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The influence of 30 keV He$^+$ ion irradiation on structural, electronic andmagnetic properties of Co$_2$MnSi thin films with B2 order was investigated. Itwas found, that irradiation with light ions can improve the local chemicalorder. This provokes changes of the electronic structure and element-specificmagnetization towards the bulk properties of the well-ordered Co$_2$MnSiHeusler compound with L2$_1$ structure.

Improvement of structural, electronic, and magnetic properties of Co$_2$MnSi thin films by He$^+$-irradiation