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We study the properties of a capacitive 13.56 MHz discharge properties with amixture of Ar/C2H2 taking into account the plasmochemistry and growth of heavyhydrocarbons. A hybrid model was developed to combine the kinetic descriptionfor electron motion and the fluid approach for negative and positive ionstransport and plasmochemical processes. A significant change of plasmaparameters related to injection of 5.8% portion of acetylene in argon wasobserved and analyzed. We found that the electronegativity of the mixture isabout 30%. The densities of negatively and positively charged heavyhydrocarbons are sufficiently large to be precursors for the formation ofnanoparticles in the discharge volume.

Modeling of chemical processes in the low pressure capacitive RF discharges in a mixture of Ar/C2H2