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The authors developed a new analysis approach for evaluation of atomicordering in full-Heusler alloys, which is extension of the commonly usedWebster model. Our model can give accurate physical formalism for the degree ofatomic ordering in the L21 structure, including correction with respect to thefully disordered A2 structure, i.e., the model can directly evaluate the degreeof L21-ordering under a lower ordering structure than the complete B2-orderingstructure. The proposed model was applied to full-Heusler Co2FeSi alloy thinfilms formed by rapid thermal annealing. The film formed at TA = 800 C showed arelatively high degree of L21-ordering of 83 % under a high degree ofB2-ordering of 97 %.

Analysis of L21-ordering in full-Heusler Co2FeSi alloy thin films formed by rapid thermal annealing