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In this work we study the quality factor associated with dissipation due toscattering of shear horizontal surface acoustic waves by random self-affineroughness. It is shown the quality factor is strongly influenced by both thesurface roughness exponent H, and the roughness amplitude w to lateralcorrelation length X ratio. Indeed, quality factors for roughness exponentsH>0.5 are comparable to quality factors due to intrinsic dissipation mechanisms(e.g., thermoelastic losses and phonon-phonon scattering) especially for wavevectors <1/X. Our results indicate that this dissipation mechanism should becarefully considered in the design micro/nanoelectromechanical systems.

Quality factor due to roughness scattering of shear horizontal surface acoustic waves in nanoresonators