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We present a high-resolution microwave spectrometer to measure thefrequency-dependent complex conductivity of a superconducting thin film nearthe critical temperature. The instrument is based on a broadband measurement ofthe complex reflection coefficient, $S_{\rm 11}$, of a coaxial transmissionline, which is terminated to a thin film sample with the electrodes in aCorbino disk shape. In the vicinity of the critical temperature, the standardcalibration technique using three known standards fails to extract the strongfrequency dependence of the complex conductivity induced by the superconductingfluctuations. This is because a small unexpected difference between the phaseparts of $S_{\rm 11}$ for a short and load standards gives rise to a largeerror in the detailed frequency dependence of the complex conductivity near thesuperconducting transition. We demonstrate that a new calibration procedureusing the normal-state conductivity of a sample as a load standard resolvesthis difficulty. The high quality performance of this spectrometer, whichcovers the frequency range between 0.1 GHz and 10 GHz, the temperature rangedown to 10 K, and the magnetic field range up to 1 T, is illustrated by theexperimental results on several thin films of both conventional and hightemperature superconductors.

Broadband method for precise microwave spectroscopy of superconducting thin films near the critical temperature