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We study NbTiN resonators by measurements of the temperature dependentresonance frequency and frequency noise. Additionally, resonators are studiedcovered with SiOx dielectric layers of various thicknesses. The resonancefrequency develops a non-monotonic temperature dependence with increasing SiOxlayer thickness. The increase in the noise is independent of the SiOxthickness, demonstrating that the noise is not dominantly related to the lowtemperature resonance frequency deviations.

Contribution of dielectrics to frequency and noise of NbTiN superconducting resonators