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The gas and effective electron temperatures have been estimated foratmospheric microplasma by means of optical emission spectroscopy. The resultshave shown that the microplasma exhibits nonequilibrium and, as its size isreduced, the two temperatures depart from each other, enhancing thenonequilibrium characteristic. The effect of methane and oxygen concentrationshas also been studied, showing that gas mixtures have an important effect onthe microplasma state.

Nonequilibrium and effect of gas mixtures in an atmospheric microplasma