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International audienceThe electron beam induced selfconsistent charge transport in layered insulators is described by means of an electron-hole fight-drift model FDM and an iterative computer simulation. Ballistic secondary electrons and holes, their attenuation and drift, as well as their recombination, trapping, and detrapping are included. Thermal and field-enhanced detrapping are described by the Poole-Frenkel effect. Furthermore, an additional surface layer with a modified electric surface conductivity is included which describes the surface leakage currents and will lead to particular charge incorporation at the interface between the surface layer and the bulk substrate

Electron beam charging of insulators with surface layer and leakage currents