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We have used two types of thermometry to study thermal fluctuations in amicrocantilever-based system below 1 K. We measured the temperature of acantilever's macroscopic degree-of-freedom (via the Brownian motion of itslowest flexural mode) and its microscopic degrees-of-freedom (via the electrontemperature of a metal sample mounted on the cantilever). We also measured bothtemperatures' response to a localized heat source. We find it possible tomaintain thermal equilibrium between these two temperatures and a refrigeratordown to at least 300 mK. These results are promising for ongoing experiments toprobe quantum effects using micromechanical devices.

Noise thermometry and electron thermometry of a sample-on-cantilever system below 1 Kelvin