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Ordered FePt nanodot arrays with extremely high density have been developed by physical vapor deposition using porous alumina templates as evaporation masks. Nanodot diameter of 18nm and periodicity of 25nm have been achieved, resulting in an areal density exceeding 1×1012dots∕in.2. Rapid thermal annealing converts the disordered fcc to L10 phase, resulting in (001)-oriented FePt nanodot arrays with perpendicular anisotropy and large coercivity, without the need of epitaxy. High anisotropy and coercivity, perpendicular easy axis orientation and extremely high density are desirable features for future magnetic data storage media applications.

FePt nanodot arrays with perpendicular easy axis, large coercivity, and extremely high density