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Insulated cantilever probes with a high aspect ratio conducting apex havebeen fabricated and their dynamic and electrical properties analyzed. Thecantilevers were coated with silicon dioxide and a via was fabricated throughthe oxide at the tip apex and backfilled with tungsten to create an insulatedprobe with a conducting tip. The stiffness and Q-factor of the cantileversincreased after the modifications and their resonances shifted to higherfrequencies. The coupling strength between the cantilever and the coating aredetermined. The applications to conductive and electromechanical imaging offerroelectric domains are illustrated, and a probe apex repair process isdemonstrated.

Fabrication, Dynamics, and Electrical Properties of Insulated SPM Probes for Electrical and Electromechanical Imaging in Liquids