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A combination of low numerical aperture focusing optics, in order to minimize spherical aberration, and beam shaping with a slit has been used to produce waveguides in fused silica by femtosecond laser writing. Waveguides with circular cross section and low losses are produced over a large depth window (>7 mm) without changing any experimental parameter. Diffraction induces beam divergence along the axis perpendicular to the slit, leading to a shift of the focal plane. The focal intensity distribution can be predicted by a hybrid model combining Gaussian beam propagation with imaging of the slit into the material. © 2007 American Institute of Physics.Peer Reviewe

Deep subsurface waveguides with circular cross section produced by femtosecond laser writing