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The aberration of a multipole Wien filter for energy-filtered x-ray photoemission electron microscopy was analyzed and the optimized Fourier components of the electric and magnetic fields for the third-order aperture aberration corrections were obtained. It was found that the third-order aperture aberration correction requires 12 electrodes and magnetic poles. ©2007 American Institute of Physic

Aberration-corrected multipole Wien filter for energy-filtered x-ray photoemission electron microscopy