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We present the design and experimental results of a near-field scanningmicrowave microscope (NSMM) working at a frequency of 1GHz. Our microscope isunique in that the sensing probe is separated from the excitation electrode tosignificantly suppress the common-mode signal. Coplanar waveguides werepatterned onto a silicon nitride cantilever interchangeable with atomic forcemicroscope (AFM) tips, which are robust for high speed scanning. In the contactmode that we are currently using, the numerical analysis shows that contrastcomes from both the variation in local dielectric properties and the sampletopography. Our microscope demonstrates the ability to achieve high resolutionmicrowave images on buried structures, as well as nano-particles, nano-wires,and biological samples.Comment: 14 pages, 7 figures, submitted to Review of Scientific Instrument

Atomic-force-microscope-compatible near-field scanning microwave microscope with separated excitation and sensing probes