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Metal carbides are good candidates to contact carbon-based semiconductors (SiC, diamond, and carbon nanotubes). Here, we report on an in situ study of carbide formation during the solid-state reaction between thin films. The solid-state reaction was examined between 11 transition metals (W, Mo, Fe, Cr, V, Nb, Mn, Ti, Ta, Zr, and Hf) and an amorphous carbon layer. Capping layers (C or TiN) of different thicknesses were applied to prevent oxidation. Carbide formation is evidenced for nine metals and the phases formed have been identified (for a temperature ranging from 100to1100°C). W first forms W2C and then WC; Mo forms Mo2C; Fe forms Fe3C; Cr first forms metastable phases Cr2C and Cr3C2−x, and finally forms Cr3C2; V forms VCx; Nb transforms into Nb2C followed by NbC; Ti forms TiC; Ta first forms Ta2C and then TaC; and Hf transforms into HfC. The activation energy for the formation of the various carbide phases has been obtained by in situ x-ray diffraction.Metal carbides are good candidates to contact carbon-based semiconductors (SiC, diamond, and carbon nanotubes). Here, we report on an in situ study of carbide formation during the solid-state reaction between thin films. The solid-state reaction was examined between 11 transition metals (W, Mo, Fe, Cr, V, Nb, Mn, Ti, Ta, Zr, and Hf) and an amorphous carbon layer. Capping layers (C or TiN) of different thicknesses were applied to prevent oxidation. Carbide formation is evidenced for nine metals and the phases formed have been identified (for a temperature ranging from 100to1100°C). W first forms W2C and then WC; Mo forms Mo2C; Fe forms Fe3C; Cr first forms metastable phases Cr2C and Cr3C2−x, and finally forms Cr3C2; V forms VCx; Nb transforms into Nb2C followed by NbC; Ti forms TiC; Ta first forms Ta2C and then TaC; and Hf transforms into HfC. The activation energy for the formation of the various carbide phases has been obtained by in situ x-ray diffraction.

Thin film solid-state reactions forming carbides as contact materials for carbon-containing semiconductors